Technologie Plattform CHyN Reinraum Bahrenfeld

Access and Usage of the CHyN clean room facility is a two-step process. After a short general safety introduction, process flow applications are submitted by respective research team and approved by the facility to ensure a safe and professional working environment. The facility is staffed with process instructors providing hands-on training and guiding the registered users on the proper operation of the complex equipment. Users can make independent bookings on the various equipment after completing the selected training sessions and subscription of the registered booking tool – cluster market – of the lab facility.

The dates and location for the monthly routine safety introduction could be downloaded here (click pdf file)

The users are mainly undergraduate students from the bachelor’s, and master’s to the PhD level, post-doctoral researchers, and senior scientists carrying out fundamental research in the fields of pharmacy, nanotechnology, biophysics, material science, microelectronics, life science, and quantum technology. Researchers from other disciplines are also welcome.

The CHyN clean room is structured into two main areas: the Yellow Room and the White Room, supported by associated user labs located outside the cleanroom complex. These labs enable advanced processing of extremely small structures down to 500 nanometers and below, high-resolution imaging, elemental analysis, and ion implantation.

The Yellow Room – Structuring at the Nanoscale

The Yellow Room is specifically designed for preparative synthesis processes such as wet-chemical processes and is also used for analytical work. It is particularly suited for lithographic structuring, conducted in a UV-protected environment. This allows for the fabrication of structures ranging from the sub-micrometer to the nanometer scale.

In addition to structuring, important material properties can be directly qualified in this area, including:

• surface roughness,
• thickness of deposited layers,
• and etch depth of structured materials.

The White Room – Deposition and Characterization of Functional Materials

Adjacent to the yellow room, the white room focuses on the nano-deposition of various thin film systems including:

• semi-conductor materials,
• functional materials such as bismuth or hafnium,
• insulating oxide or nitride layers for passivation,
• and metallic materials like gold, titanium, platinum, aluminum, or copper etc.

Moreover, the white room enables dry etching for structural definition or patterning and optical characterization of deposited layers. These capabilities make it possible to design and transform materials into highly functional structures.

Should you require more information or interested in getting access to use the technology platform CHyN clean room, you could reach out to us through: rrbuch"AT"physnet.uni-hamburg.de.

Dr.-Ing. Lewis Olaniyi Akinsinde

Coordinator Clean Room Technology Platform

Office: CFEL - Center for Free Electron Laser Science Hamburg, Building 99, Room O1.125

Luruper Chaussee 149

D-22761 Hamburg

Tel.: +49 (0)151 5538 8158

E-Mail: lewis-olaniyi.akinsinde@uni-hamburg.de